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MGF2 CLADDING LAYER ON ELECTRON BEAM FABRICATED WAVEGUIDES

Ary Syahriar

Agency for the Assessment and Application of Technology
BPPT New Building 21st Floor
Jl. MH. Thamrin 8
Jakarta 10340

Abstract
The deposition of MgF2 cladding layers of electron beam fabricated waveguide is presented. Theoretical and experimental steps had been employed to choose suitable low temperature deposition material. Characterisations proved that MgF2 could be used as cladding layer as long as appropriate thickness is achieved so that the acceptable waveguide loss might be fulfilled. Further application on electron beam waveguide as switching devices was also demonstrated.

Publication : Physics Journal IPS A7 (2004) 0213
Full paper : format PDF (173.644 byte)
Contact : Ary Syahriar
Additional info : 5 pages, language English