Jurnal Fisika Himpunan Fisika Indonesia
DEPOSISI FASA CAIR LAPISAN TIPIS CUO UNTUK SENSOR GAS CO2
Irmansyah, Akhiruddin Maddu dan Tunjung Wismadi
Laboratorium Fisika Material, Jurusan Fisika, FMIPA-IPB, Jl. Raya Pajajaran, Bogor, Indonesia
Gas sensors based on oxide semiconductor materials is based on the fact that the stoichiometry of sensor materials is changes in when absorbs any gas sample, so that the electrical properties of sensor materials changed. Study of CO2 gas sensor on CuO semiconductor films have been performed. CuO films was deposited on conductive material coated glass substrate by liquid phase deposition (LPD) method. Study of gas sensing properties on CuO films was carried out at CO2 atmospheric condition in a isolated vessel (reactor) made from steinless steel with variation of CO2 gas pressure or concentration. It's obtained that resistance (R) of CuO films changes in with variation of CO2 gas pressure or concentrations on the CuO film surfaces. By logaritmic curve of resistance value of CuO films versus CO2 gas pressure is obtained a negative slope about -1/4. Also, resistance of CuO films is linearly decrease with CO2 gas concentration increase. Sensitivity of sensor is obtained that linearly increase with CO2 gas concentration increase.