Physics Journal of the Indonesian Physical Society
MGF2 CLADDING LAYER ON ELECTRON BEAM FABRICATED WAVEGUIDES
Agency for the Assessment and Application of Technology
BPPT New Building 21st Floor
Jl. MH. Thamrin 8
The deposition of MgF2 cladding layers of electron beam fabricated waveguide is presented. Theoretical and experimental steps had been employed to choose suitable low temperature deposition material. Characterisations proved that MgF2 could be used as cladding layer as long as appropriate thickness is achieved so that the acceptable waveguide loss might be fulfilled. Further application on electron beam waveguide as switching devices was also demonstrated.